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Conventional Type FLT -45℃~80℃

Semiconductor Water & Air Chiller

FLT -45℃~80℃
  • Temperture accuracy±0.1℃
  • Flow control25~75/min 6bar max
  • RefrigentR404A R410A
  • Power range380V 3.5kW~16kW
Description

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

Model

FLT-002

FLT-002W

FLT-003

FLT-003W

FLT-004

FLT-004W

FLT-006

FLT-006W

FLT-008

FLT-008W

FLT-010

FLT-010W

FLT-015

FLT-015W

Tempearature Control

 5℃~40℃

Temperature accuracy

±0.0.5℃  

Flow control  

10~25L/min  5bar max

15~45L/min  6bar max

25~75L/min  6bar max

Refrigeration capacity@10℃

 6kw

 8kw

 10kw

15 kw

 20kw

 25kw

 40kw

Internal circulation liquid volume

4L

5L

6L

8L

10L

12L

20L

Expansion tank capacity

10L

10L

15L

15L

20L

25L

35L

Refrigerant

R410A

Secondary Refrigerant

Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10 ℃)

Entry and exit interfaces

ZG1/2

ZG1/2

ZG3/4

ZG3/4

ZG3/4

ZG1

ZG1

Cooling water outlet

ZG1/2

ZG1/2

ZG3/4

ZG1

ZG1

ZG1

ZG1 1/8

Cooling water flow rate@20℃

1.5m³/h

2m³/h

2.5m³/h

4m³/h

4.5m³/h

5.6m³/h

9m³/h

power supply 380V

3.5kW

4kW

5.5kW

7kW

9.5kW

12kW

16kW

Temperature extension

By adding an electric heater, expand the temperature range from -25 ℃ to 80 ℃

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

client output signal

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