Search the whole station Pharmaceutical Chiller 产品分类菜单

Outdoor chiller unit or Indoor chiller unit

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Equipped with a cooler, it avoids the consumption of liquid nitrogen, carbon dioxide, etc. Each system includes a chuck and a cold and hot control unit;

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  1. Cooling photolithography, dry etching
  2. Cooling the furnace body and walls
  3. Cooling CVD reaction chambers and equipment
  4. Cooling targets and PVD equipment
  5. Cooling ion implantation equipment
  6. Cool the grinding disc and equipment
  7. Cooling probe table, grinding disc and equipment
  8. Cooling packaging equipment and mold
  9. Fluoride waste gas condensation recovery

Please leave your process temperature control requirements here

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How many channels do you need?

Channel 1Channel 2Channel 3
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Serial Communication

Remote operation signal input

Alarm, Running status, Signal output

Normal Temp/ Low Temp/ Ultra Low Temperature

Water Cooling/ Air Cooling

Power 0.5kW~2000kW

Temperature Control :-120℃~350℃

Temperature Control: -40℃~100℃

(LNEYA’s chiller supports both indoor and outdoor options.)