Chiller without compressor（heat exchange system）

ETCU +5℃~90℃

Products Semiconductor Cooling Chiller

Cooling power5KW &8.5kW
Cooling Water Temperture 5℃~90℃
Cooling Capacity5kW~30kW
Source220V 50HZ/60hz

REQUEST

Description

Parameters

Temperature control in semiconductor production and testing processes

Heating method within 40 ℃ adopts a compressor hot gas heating fully enclosed design, and the machine operates continuously for 24 hours

Ensure stable and reliable overall semiconductor process flow from front-end to back-end

Product’s Description

The semiconductor temperature control device Chiller is mainly used for precise temperature control in semiconductor production and testing processes. Its products include fluid fluorinated liquid temperature control (minimum -100 degrees), rapid temperature change of gas cooling and heating, rapid temperature change chuck, low-temperature gas refrigeration machine (-120 degrees), direct cooling refrigeration unit (-150 degrees), etc. The company applies various algorithms (PID, feedforward PID, and model free self built tree algorithm) in the system to achieve fast response and high control accuracy.

The important information such as the exhaust and suction temperature (pressure), condensation temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), electrical power, current and voltage of each component, and water tank level of the chiller are all comprehensively managed, monitored and recorded through sensors connected to the control system.

Application scenarios of temperature control in semiconductor process

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Can be integrated into the client for remote PC control

Client A

Client B

Variable frequency pump can adjust the circulating liquid pressure and flow rate

The output pressure and flow rate of the circulating liquid can be set on the operation panel. Even under various customer piping conditions, without bypass piping adjustment, it can be automatically controlled at the set output pressure through a variable frequency pump. As a result, the power consumption of the pump can be reduced.

Depending on the flow rate, bypass piping may be required

Model	ETCU-005W	ETCU-008W	ETCU-015W	ETCU-030W
Temp Range	Cooling Water Temp +5℃~90℃ ±0.3℃
Cooling Water Temp	7℃~30℃ Use Siemens/Honeywell regulating valve to control cooling water flow
Cooling Capacity	5kw	8kw	15kw	30kw
	Test conditions: At maximum circulation volume, the temperature difference between the temperature control temperature and the cooling water temperature is 15°C
Circulation pump flow	7~20L/min 5bar	7~20L/min 5bar	15~40L/min 5bar	20~60L/min 5bar
Tank volume	6L	8L	10L	15L
Size	480750390	480750390	480750390	480750500
Power	220V 50HZ/60hz 0.6kw		220V 50HZ/60hz1.3kw	220V 50HZ/60hz 1.6kw