Double frequency conversion series; Cooling Chiller

FLT Z -30℃~40℃

Products Semiconductor Cooling Chiller

Temperture accuracy±0.1℃
Flow control15~45/min 6bar max
Pump Pressure6Bar max
Power range380V 3.5kW Heating

semiconductor chiller

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Description

Parameters

chillers that control the processing temperature on the Fab equipments

Single channel air-cooled cooler, mainly designed for etching machines. It is used to provide independent temperature control for the chamber side walls.

Heating function

Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.

Communication function

Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.

client output signal

Model	FLTZ-305W	FLTZ-305W/2T Double System
Temp Range	-30℃~40℃	-30℃~40℃	-30℃~40℃
Temp control accuracy	±0.1℃	±0.1℃	±0.1℃
Flow Control	15～45L/min ±0.3	15～45L/min ±0.3	15～45L/min ±0.3
Pump Pressure	6bar max	6bar max	6bar max
Heating	2.5kw	2.5kw	2.5kw
Cooling capacity@15℃	11kw	11kw	11kw
Cooling capacity@-15℃	5kw about 4500rpm	5kw about 4500rpm	5kw about 4500rpm
Internal circulation fluid volume	8L	8L	8L
Expansion tank volume	15L	25L
Thermal medium	Fluorinated fluid, antifreeze, thermal silicone oil, etc.
Thermal medium interface	ZG3/4	ZG3/4	ZG3/4
Cooling water interface	ZG3/4	ZG3/4
Cooling Water	30L/min @20℃	60L/min @20℃
Power	220V 50/60HZ	220V 50/60HZ
Breaker	40A	80A
Weight	4507001600	6508501600
	Optional 3.5kw electric heating, the temperature can be extended to 90℃, the power supply needs to be changed to 380V