Semiconductor laboratory cooling water system
Semiconductor laboratory cooling water system
Semiconductor technology is a high-precision, high-tech manufacturing process that involves many key steps such as photolithography, etching, ion implantation, etc. During these processes, a large amount of cooling water is required to maintain stable operation of the equipment and product quality.
In semiconductor technology, cooling water is mainly used for the following purposes:
Reduce Equipment Temperature: During the manufacturing process, equipment generates a large amount of heat energy. If not cooled down in a timely manner, it will affect equipment performance and product quality.
Stabilization Process: Many process steps require strict control of parameters such as temperature and humidity, in which case cooling water can provide a stable environment.
The semiconductor temperature control system mainly consists of a heating cycle system, a cooling system, a control system, a box, etc. The heating cycle system consists of a circulation pump, an electric heater, an expansion vessel, an exhaust valve, a one-way valve, a thermal resistor, and a circulation pipeline. The control system adopts PID control technology, high-definition display screen, and multiple protection functions to ensure the safe operation of the equipment. By heating and cooling the unit itself, the heat transfer fluid is transported to the outside to meet the process requirements.
Fully Enclosed System: Adopting a fully enclosed system design, the heat transfer oil will not directly come into contact with air, extending the service life of the heat transfer oil while ensuring the stability of the system operation. There is no oil mist generated at high temperatures.
Efficient Heat Exchange System: The system adopts pipeline heating and cooling, with very little liquid involved in circulation.
Control Result Repeatability: Based on advanced dynamic control system, consistent control results can be achieved every time, greatly improving the stability of product production.
Ultra high temperature cooling technology: By using ultra high temperature cooling technology, it is possible to achieve rapid cooling by directly introducing cooling water at a high temperature of 350 ℃.
In the field of scientific research, it can be used to control the temperature in laboratories and conduct experiments and research in areas such as biology and pharmaceuticals.
Semiconductor Cooling Water System
Temperture accuracy
±0.1℃
Flow control
15~45/min 6bar max
MORETemperture accuracy
±0.1℃
Flow control
25~75/min 6bar max
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