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Semiconductor Cooling Chiller

Temperture accuracy ±0.1℃ Flow control 15~45/min 6bar max

Double Frequency Conversion FLTZ -30℃~40℃
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Temperture accuracy ±0.1℃ Flow control 25~75/min 6bar max

Low Temp Series FLT -100℃~80℃
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Temperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end t...

Conventional Type FLT -45℃~80℃
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Temperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end t...

Heat Exchange Chiller ETCU +5℃~90℃
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