AES -115℃~225℃
319Cooling water 0.6m³/h~3m³/h Power range 3.7kW~7.5kW
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Heating Power 2.5kW~25kW Cooling capacity 0.25kW~25kW Power range 6.5kW~50kW
View detailsTemperture accuracy ±0.1℃ Flow control 15~45/min 6bar max
View detailsTemperture accuracy ±0.1℃ Flow control 25~75/min 6bar max
View detailsTemperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProduct's Descriptionchillers that control the processing temperature on the Fab equipment...
View detailsTemperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProduct's Descriptionchillers that control the processing temperature on the Fab equipment...
View detailsTemperature control in semiconductor production and testing processesEnsure stable and reliable overall semiconductor process flow from front-end to back-endProduct's DescriptionApplication scenarios of temperature control in semiconductor process...
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