Semiconductor Exhaust Gas Condensation

YQH 0℃~-75℃

Cold-zone Pressure8 Bar
Cooling Water @25℃1300L/H~3000L/H 1BAR~4BAR
Power3kW~8kW

Description

VOCS gas condensation capture and recovery

Suitable for the recovery of various volatile VOCs gases; Fast cooling, high efficiency, meeting different condensing temperature requirements, low temperature can reach -75 ° C

Where do harmful gases come from?

It mainly comes from the cleaning, glue leveling, glue removal, etching and development processes of chip or circuit board production.

high exhaust volume and Low emission concentration

The core process of integrated circuit manufacturing produces a large amount of acid-base, arsane, phosphine, organic and other process waste gases. A local scrubber is required for waste gas condensation capture and recovery.

Organic waste gas mainly comes from cleaning, CVD, photolithography, wet etching, degumming and diffusion processes. The types of organic waste gas mainly include isopropyl alcohol, acetone, propylene glycol monomethyl ether acetate, ethyl lactate, butyl acetate, heavy aromatics, etc.

Working Principle

Introduce the volatile VOCS gas into the equipment cold box (the device is set to a condensation temperature of 3°C-40°C-75°C-115°C). Other temperature zones can be customized to follow the needs for step-by-step condensation and liquefaction. Some continuous production processes have a dual-channel switching process in the low-temperature section (after one side is blocked by ice, it is directly switched to the other channel for heat exchange and condensation in the cold box, and at the same time, the ice blockage is tested for defrost treatment).

Customized 25 BAR

Heat exchange system pressure resistance

-40~-75℃

Meet different temperatures

Model	YQH-3520EXd YQH-3520Wexd	YQH-7520EXd YQH-7520WEXd	YQH-3530EXd YQH-3530WEXd	YQH-7530EXd YQH-7530WEXd
Gas flow	20m3/h	20m3/h	30m3/h	30m3/h
Lowest temperature	-35℃	-75℃	-35℃	-75℃
First level temperature	0℃	0℃	0℃	0℃
Cold box pressure	8bar	8bar	8bar	8bar
Heat exchange area	3m2*2	3m2*2	5m2*2	5m2*2
Heat exchanger material	SUS304	SUS304	SUS304	SUS304
Pressure monitoring	Anti-ice blocking pressure monitoring and protection for the inlet and outlet of the primary and secondary evaporation traps
Defrost control	Defrost control can be performed based on pressure monitoring
Air inlet diameter	DN40 PN16	DN40 PN16	DN50 PN16	DN50 PN16
Recovery liquid storage tank	10L Optional installation of recovery transfer pump		15L Optional installation of recovery transfer pump
Drain port diameter	G1/2	G1/2	G1/2	G1/2
Control System	Siemens PLC
Display and record	7-inch color touch screen
Compressor	Emerson Copeland Scroll flexible compressor (explosion-proof is epoxy resin encapsulated)
Power supply 380V 50HZ MAX	3.5KW	5KW	4KW	6KW
Size	80012001850	80012001850	100015001850	100015001850
Cooling water (water cooling)20℃	1800L/H 1BAR~4BAR G3/4		3000L/H 1BAR~4BAR G3/4