ZLJ -40℃~-15℃

Direct Cooled Chiller for semiconductor production process

Semiconductor Thermal Control Systems

Compressor1.5hp~7hp
RefrigentR404A R507C R448
Power range380V 50HZ can choose 220V
Temperture accuracy±0.5℃

semiconductor air chiller

Consultation Price

Description

Parameters

Temperature control in semiconductor production and testing processes

CHILLER direct cooling type

Multiple control requirements can be achieved by merging multiple devices into a larger cabinet

Used for small heat exchange area and large heat exchange capacity

Model Description

Equipped with direct cooling technology at a high temperature of 150℃, meeting the target of rapid cooling ability during high-temperature operation

The product directly outputs and evaporates the refrigerant in the refrigeration system into the target control element (heat exchanger) for heat exchange, thereby cooling the target control object. Compared with the fluid (gas) transported into the heat exchanger, the heat exchange capacity is generally more than 5 times higher, which is especially suitable for applications where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large.

The direct-cooling refrigerator can also be used as gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.

1.Refrigerant interface 2. Portable handle

3. Touch screen 4. Portable handle

5. Touch screen card slot 6. Air outlet

Security protection

Using Schneider and other brands of residual current circuit breakers, phase sequence phase breakers, liquid level protectors, high and low voltage protectors, and high temperature protectors

Data communication interface

Standard configuration includes one PT100, USB interface, and RS485 communication interface. Various other analog interfaces and contact signals can be selected, as well as Ethernet interface

Widely applicable to etching, chemical vapor deposition, and physical vapor deposition processes in semiconductor wafer factories

Model	ZLJ-41.0	ZLJ-41.5	ZLJ-42	ZLJ-43	ZLJ-44	ZLJ-46	ZLJ-48
Model	ZLJ-41.0W	ZLJ-41.5W	ZLJ-42W	ZLJ-43W	ZLJ-44W	ZLJ-46W	ZLJ-48W
Temperature range	-40℃～-10℃
Temperature control accuracy	±0.5℃ control evaporation temperature
Throttling method	Electronic expansion valve
Controller	Siemens PLC
Show record	7-inch touch screen, record temperature, system pressure and other information
Main components	Danfoss filter drier, Castor solenoid valve, Johnson Controls pressure sensor, EBM fan (air-cooled), Danfoss/Emerson oil separator,
Compressor	Secop, Taikang, Emerson, Carlisle
Refrigerant	R404A Optional R507C R448
High temperature cooling	With 150 degrees high temperature direct cooling technology, to meet the goal of rapid cooling ability during high temperature operation
Compressor	7/8HP	1.5HP	2HP	3HP	4HP	6HP	8HP
Power supply V	220V 50HZ			380V 50HZ Can be customized 220V